M³: Microscope-based maskless micropatterning with dry film photoresist.
نویسندگان
چکیده
We present a maskless micropatterning system that utilizes a fluorescence microscope with programmable X-Y stage and dry film photoresist to realize feature sizes in the sub-millimeter range (40-700 μm). The method allows for flexible in-house maskless photolithography without a dedicated microfabrication facility and is well-suited for rapid prototyping of microfluidic channels, scaffold templates for protein/cell patterning or optically-guided cell encapsulation for biomedical applications.
منابع مشابه
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عنوان ژورنال:
- Biomedical microdevices
دوره 13 2 شماره
صفحات -
تاریخ انتشار 2011